Non-Contact Ultra-Precision Metrology of Superfine Cylinders with a Developed Two-Dimensional Coordinate Measuring Device

Abstract

To address the issue of roundness and diameter measurement of superfine cylindrical parts which can be moved and/or hooked up by a stylus due to the measuring force in the contact measurement, a simple two-dimensional coordinate measuring device is developed for the non-contact ultra-precision measurement of the superfine cylindrical parts. A coordinate modeling-dividing measurement method is proposed, by which the cross-sectional circle of a small cylindrical part is modeled in coordinates and divided into several equal arcs for scanning measurement, and the arc data composed of large numbers of coordinate points can be obtained by using the developed coordinate measuring device. Thus, the radius and arc profile of each arc can be calculated through a series of data processing. The radius and roundness profile of the measured small cylinder can be obtained by averaging the radius of these arcs and stitching these arc profiles together,respectively.

Keywords: Keywords: Non-contact, Ultra-precision, Metrology, Superfine cylinder, Coordinate measurement