Removal of Metal Impurities from Diamond Wire Saw Silicon Powder By Vacuum Electromagnetic Directional Solidification

Abstract

Recycling silicon from diamond wire saw silicon powder (DWSSP) is a promising solution to fulfill the continuously expanding of high purity silicon demand. Vacuum directional solidification technology using high-frequency electromagnetic induction heating was proposed to purify DWSSP for the first time efficiently. The silicon melt and gas interface reaction, as well as metal impurities’ microsegregation in silicon ingot were observed. The effects of vacuum level and electromagnetic force on the separation of silicon and metal impurities were investigated using thermodynamics and electromagnetic mechanics. Results indicate that the content of oxygen in the silicon reduced from 30.91 wt% to 5.08 wt%, and the actual sample composition including for uptake of residual gas contamination steadily declined as the vacuum level increased from 600 Pa to 10 Pa. Vacuum electromagnetic directional solidification reduced the content of metal impurities from 641 ppmw to 29.8 ppmw, increases the proportion of crystalline silicon area, and makes the silicon lattice arrangement more regular.

Keywords: Diamond wire saw silicon powder, Silicon purification, Metal impurities, Vacuum refining, Electromagnetic solidification