Properties and Stability of Atomic Layer Deposition Modified Track-Etched Single Conical Nanopore

Abstract

In recent years, nanopores have been developed extensively for prospective applications in biomolecule detection.The performance of nanopore greatly depends on its diameter and geometry. In recent years, reseachers modified the properties and size of nanopores by Atomic Layer Deposition (ALD) method, and have made some progress in single molecule detection. However, there are few studies on the properties and stability of nanopores modified by ALD method. In this letter, we investigate the stability and ionic transport behavior of ALD-modified track-etched single conical nanopores are studied. The results show that the nanopores modified by ALD well retains the ionic transport characteristics of track-etched single conical nanopore, and the stability is also very good. ALD-modified track-etched single conical nanopores can be reused in the harsh environment and is a powerful tool for single molecule detection.

Keywords: heavy ion irradiation, nanopore, atomic layer deposition, track-etching, ionic conductivity