Study on the synergistic inhibition mechanism of mixed inhibitors adsorbed on copper surface

Abstract

In this paper, the synergistic and inhibition mechanism was investigated for mixed inhibitor of sulfathiazole (ST) and 1,2,4-triazole. The inhibition efficiency was analyzed potential polarization curves, UV-Vis spectroscopy, and contact angle measurements. It uses the adsorption isotherms, quantum chemical calculations, and molecular dynamic simulation techniques to elucidate the type of adsorption processes, and employs an electrochemical impedance spectroscopy, distribution of relaxation time, and polishing methodology to demonstrate the inhibitory effect of mixed inhibitors. The results show that both ST and TAZ can inhibit the corrosion of Cu, and the mixture provides better inhibition efficiency and improves the polishing surface quality.

Keywords: Cu-CMP, mixed inhibitor, synergistic corrosion inhibition mechanism, electrochemical