Silicon-Based Micro-Calorimeter for Thermal Detection Using Single Thermocouple Structure

Abstract

A suspension bridge structure for bio-thermal detection using a single thermocouple is proposed for a silicon-based micro-calorimeter. Using silicon-based electrodes and suspension bridge structure, the micro-calorimeter fabricated through micro-machining technology offers high sensitivity and rapid detection of heat changes during enzymatic reactions, with enzymes fixed on beads within the reaction chamber. With an accuracy of 0.38 V/W sensitivity and response time under 200 ms, it shows great potential for health testing and thermal bio-detection. The micro-calorimeter can be integrated with microfluidic systems to detect thermal variations, making it highly effective for biological detection applications.

Keywords: Micro-calorimeter, Thermocouple Structure, Biosensor, Microfluidics