Structure and Mechanical Properties of Zr-B-C-N Coatings Obtained by Magnetron Sputtering in C2h2/N2 Atmosphere

Abstract

To enhance the structure and mechanical properties of Zr-B-C-N coatings, high power pulsed magnetron sputtering technology was employed, using ZrB2 as the target material and C2H2 and N2 as the reactive gases for the deposition of Zr-B-C-N coatings. The effects of different N2 flow rates on the composition, structure, and mechanical properties of the Zr-B-C-N coatings were investigated. With the increase in N2 flow rate, the hardness and elastic modulus of the Zr-B-C-N coatings decreased, and the friction coefficient also decreased. The coating structure shifted from being predominantly ZrB2 to a combination of o-Zr3N4 and fcc-ZrC phases. When the N2 flow rate exceeded 10 sccm, the crystalline phase in the coating significantly reduced, and the main composition became amorphous or short-range ordered structures. The Zr-B-C-N coating prepared at a nitrogen flow rate of 10 sccm N2 exhibited the lowest wear rate of 2.3×10-8 mm3/N∙m, demonstrating excellent wear resistance. This coating exhibited high adhesion to the substrate, a low friction coefficient, appropriate compressive stress, and hardness.

Keywords: coating, magnetron sputtering, structure, Mechanical Properties