Sintering Behaviors, Microstructure and Properties of Lio2-Al2o3-Sio2 Glass-Ceramics for Ltcc Applications

Abstract

ABSTRACT When preparing glass-ceramics by using sintering method, porosity is the main reason affecting their properties. In order to glass-ceramics with low thermal expansion performance, cold isostatic pressing is adopted to greatly reduce the porosity. In this study, we systematically analyzed the effect of CaF2/CaO content on sintering behavior, microstructure and properties of LAS glass ceramic. It was found that the [CaF2]/([CaO]+[CaF2]) ratio x can used to regulate thermal expansion coefficient of the LAS glass-ceramics. The optimized sample has CTE (2.2865 ppm/℃) compatible with that of silicon (2.5 ppm/℃). At the same time, low dielectric constant (5.95 ≤ εr ≤ 8.89) and dielectric loss (1.179×10-3 ≤ tanδ ≤ 2.871×10-2) are observed, which makes them a promising candidate for low-temperature co-fired ceramic substrate applications.

Keywords: Keywords: LAS glass-ceramic, LTCC, densification, CTE, Vickers hardness