Micro-Motion Characteristics and Composite Motion of Macro-Micro Dual-Drive Feeding System Based on Hydrostatic Support

Traditional feed system of CNC machine tools cannot simultaneously meet the requirements of long travel, high precision, and high load capacity. This paper proposes a macro-micro dual-drive feeding system based on hydrostatic support (MDFSHS). Dynamic model of the micro-feeding system is established and validated, and its dynamic characteristics are analyzed. The results show that the settling time of the step response decreases from 0.25s to 0.10s, with the bias voltage decreasing from 3V to 1V. The settling time of the step response decreases from 0.1s to 0.06s, with the pipeline length shortening from 1.08m to 0.92m. Finally, the macro-micro composite motion control strategy is developed, achieving a feed precision of 100nm. This outcome substantiates the validity of the proposed MDFSHS.

Keywords: Hydrostatic support, Macro-Micro dual drive, Feed system, Dynamic characteristic

Suggested Citation: Suggested Citation

Lu, Dezhao and Qi, Zheng and Wang, Weishaoqi and Liu, Jiawei and Zhang, Heji and Wu, Lupeng and Zhang, Yongtao, Micro-Motion Characteristics and Composite Motion of Macro-Micro Dual-Drive Feeding System Based on Hydrostatic Support. Available at SSRN: https://ssrn.com/abstract=5105768 or http://dx.doi.org/10.2139/ssrn.5105768