A Novel Anti-Corrosion Strategy for Ultra-High Purity 316l Stainless Steel in the Semiconductor Industry: Leveraging Alternating Voltage Passivation and Nitric Acid Passivation

Abstract

Leveraging alternating voltage passivation (AVP) and nitric acid passivation (NP), this study introduces a novel anti-corrosion technique of composite passivation for ultra-high purity 316L stainless steel in semiconductor industries. Upon the synergistic effect of AVP and NP, a high-quality passive film with greater thickness, a higher Cr/Fe ratio and a lower defect density is formed apart from the removal of the weaknesses susceptible to corrosion, including oxide-inclusions, surface defects and non-close packed crystallographic planes, resulting in a substantial improvement in corrosion resistance. The suitability of composite passivation in semiconductor environments was validated using a self-developed laboratory device.

Keywords: stainless steel, Electronic special gases, passive film, Alternating voltage passivation, Nitric acid passivation