A Novel Ultra-Thin Plate Micropump

Abstract

Ultra-thin plate micropumps are essential components in microfluidic cooling systems. However, their development is fundamentally limited by the necessity to concurrently optimize performance and compactness. This study introduces a novel ultra-thin plate micropump that synergistically integrates global hydraulic parameter optimization with compact electromechanical system design, aiming to achieve significant advancements in performance. A dual-dimensional hydraulic-electromechanical optimization framework has been established through a cross-domain collaborative mechanism based on shared parameters including rotational speed, torque, and radial dimensions of the motor and hydraulic components. In the hydraulic dimension, a parameterized flow channel model combined with computational fluid dynamics (CFD) simulations effectively mitigates leakage flow and reduces turbulent kinetic energy dissipation, resulting in a pressure head prediction error within 5.7%. In the electromechanical dimension, an optimized planar driver layout along with geometric matching design enhances torque density while minimizing axial dimensions. A micropump with the overall size of 34×34×4.93 mm3 was fabricated and integrated. Experimental results indicate that the prototype achieves a stable output of 100 mL/min at 12.06 kPa and the power consumption is only 1 W.

Keywords: Ultra-thin plate micropump, Co-design, Microfluidic cooling, Compact integration