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Can Sheng

Hunan University

2 Lushan South Rd

Changsha, CA 410082

China

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Quasi-epitaxial Growth of Aluminum Nitride Films on (0002)-oriented Titanium Buffer Layer by Magnetron Sputtering

Number of pages: 22 Posted: 20 Jan 2026
Jing Sun, Ruoyuan Xie, Can Sheng, Pan Xu, Shaoqing Xu, Chao Ma, Xueyun Wang, Jiawang Hong and Bin Yang
Hunan University, Hunan University, Hunan University, Hunan University, Beijing Institute of Technology, Hunan University, Beijing University of Technology, Beijing Institute of Technology and Hunan University
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Aluminum nitride, Quasi-epitaxial growth, Piezoelectric coefficient, Titanium buffer layer, Magnetron sputtering