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Shaoqing Xu

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

  • Beijing Institute of Technology

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Quasi-epitaxial Growth of Aluminum Nitride Films on (0002)-oriented Titanium Buffer Layer by Magnetron Sputtering

Number of pages: 22 Posted: 20 Jan 2026
Jing Sun, Ruoyuan Xie, Can Sheng, Pan Xu, Shaoqing Xu, Chao Ma, Xueyun Wang, Jiawang Hong and Bin Yang
Hunan University, Hunan University, Hunan University, Hunan University, Beijing Institute of Technology, Hunan University, Beijing University of Technology, Beijing Institute of Technology and Hunan University
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Abstract:

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Aluminum nitride, Quasi-epitaxial growth, Piezoelectric coefficient, Titanium buffer layer, Magnetron sputtering