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Wenya Zhou

Wuhan University of Technology

Wuhan, 430063

China

  • Wuhan University of Technology

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Liquid-metal-printed buffer layer enabling offcut-tolerant MOCVD heteroepitaxy of β-Ga2O3 on sapphire

Number of pages: 26 Posted: 21 Jan 2026
Yun Li, Song Zhang, Wenya Zhou, Yao Lu, Xinglin Liu, Rong Tu, Qiangmin Wei and Baowen Li
Wuhan University of Technology, Wuhan University of Technology, Wuhan University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Wuhan University of Technology, JFS Laboratory and Wuhan University of Technology - State Key Laboratory of Advanced Technology for Materials Synthesis and Processing
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Abstract:

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β-Ga2O3, Heteroepitaxy, MOCVD, Liquid metal printing, Buffer layer