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Yinhao An

Sungkyunkwan University - Natural Sciences Campus

Suwon, 16419

  • Sungkyunkwan University - Natural Sciences Campus

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Investigation on the particle cleaning mechanism of surfactant for amorphous carbon post-CMP cleaning at high pH

Number of pages: 22 Posted: 15 Mar 2026
Minha Kim, Ziyang Wang, Jinhyoung Lee, Hyeonjeong Lee, Yinhao An, Changshou Jin and Taesung Kim
Sungkyunkwan University - Natural Sciences Campus, Sungkyunkwan University, Sungkyunkwan University - Natural Sciences Campus, Sungkyunkwan University, Sungkyunkwan University - Natural Sciences Campus, Sungkyunkwan University - Natural Sciences Campus and Sungkyunkwan University
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Abstract:

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Surfactant, Amorphous carbon, Chemical mechanical polishing, Post-CMP cleaning, Particle contamination.