Hui Kang

Tsinghua University

Beijing, 100084

China

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Effect of film thickness on solution-processed Al2O3 high-k dielectric properties and TFT performance

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Effect of film thickness on solution-processed Al2O3 high-k dielectric properties and TFT performance

Number of pages: 26 Posted: 06 May 2026

Hui Kang, Siqing Yuan, Yihuan Wang, Jingwei Zhang, Dewen Zhao, Zhimin Chai and Xinchun Lu

Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University and Tsinghua University

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Effect of film thickness on solution-processed Al2O3 high-k dielectric properties and TFT performance

Number of pages: 26 Posted: 04 May 2026

Hui Kang, Siqing Yuan, Yihuan Wang, Jingwei Zhang, Dewen Zhao, Zhimin Chai and Xinchun Lu

Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University and Tsinghua University

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