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Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

Number of pages: 37 Posted: 04 May 2026

Iryna Naiko, Rainer Hippler, Harm Wulff, Christiane A. Helm, Jan Wallis, Angela Kruth, Dagmar Chvostová, Natalia Nepomniashchaia, Zdeněk Remeš, Jiri Olejnicek, Martin Cada and Zdeněk Hubička

affiliation not provided to SSRN, University of Greifswald, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Czech Academy of Sciences - Institute of Physics, Czech Academy of Sciences, affiliation not provided to SSRN and Czech Academy of Sciences

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Martin Cada

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Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

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