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Zdeněk Hubička

Czech Academy of Sciences

SCHOLARLY PAPERS

3

DOWNLOADS

74

TOTAL CITATIONS

2

Scholarly Papers (3)

1.

Effect of Magnetron Configuration on the Spatial Distribution of Sputtered Species in High-Power Impulse Magnetron Sputtering (Hipims) Plasmas

Number of pages: 19 Posted: 18 Feb 2025
Anna Kapran, Charles Ballage, Zdeněk Hubička and Tiberiu Minea
affiliation not provided to SSRN, affiliation not provided to SSRN, Czech Academy of Sciences and University of Paris-Saclay
Downloads 38 (1,209,354)
Citation 2

Abstract:

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HiPIMS, plasma diagnostics, magnetron balancing degree, m-QCM, spatial distribution, ionized flux fraction

2.

Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

Number of pages: 37 Posted: 04 May 2026
affiliation not provided to SSRN, University of Greifswald, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Czech Academy of Sciences - Institute of Physics, Czech Academy of Sciences, affiliation not provided to SSRN and Czech Academy of Sciences
Downloads 19 (1,491,251)

Abstract:

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ZrO2 film, reactive magnetron sputtering, negatively charged ions, ion energy distribution, vibrational spectroscopy

3.

Trapping, Screening, and Turning Bimolecular: Charge Carrier Dynamics in TiO₂ UV Photodetectors Grown by Physical Vapor Deposition

Number of pages: 22 Posted: 16 May 2026
affiliation not provided to SSRN, Czech Academy of Sciences, Czech Academy of Sciences, affiliation not provided to SSRN, Czech Academy of Sciences and affiliation not provided to SSRN
Downloads 17 (1,491,251)

Abstract:

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Titanium dioxide, ultraviolet photodetectors, physical vapor deposition, time-resolved microwave conductivity measurements, GHz probe