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Aldona Kubala-Kukuś

affiliation not provided to SSRN

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Fabrication and Metrological Validation of a Candidate AFM Calibration Standard Based on Silicon Nanostructures

Number of pages: 10 Posted: 05 Jun 2026
Aldona Kubala-Kukuś, Dariusz Banaś, Dariusz Czułek, Krzysztof Domański, Janusz D. Fidelus, Marta Goliszek-Chabros, Paweł Jagodziński, Paweł Janus, Magdalena Kucharska, Urszula Maciołek, Aldona Nowicka, Piotr Prokaryn, Andrzej Sierakowski, Krzysztof Skrzypiec, Weronika Sofinska-Chmiel, Ilona Stabrawa and Karol Szary
affiliation not provided to SSRN, affiliation not provided to SSRN, Central Office of Measures, affiliation not provided to SSRN, Central Office of Measures, Maria Curie-Sklodowska University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Maria Curie-Sklodowska University, Maria Curie-Sklodowska University, affiliation not provided to SSRN, affiliation not provided to SSRN, Maria Curie-Sklodowska University, Maria Curie-Sklodowska University, affiliation not provided to SSRN and affiliation not provided to SSRN
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atomic force microscopy, calibration standards, electron beam lithography, projection photolithography, surface microstructure mapping, scanning electron microscopy