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Shaokang Wang

Changchun University of Science and Technology

China

  • Changchun University of Science and Technology

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

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Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

Number of pages: 19 Posted: 06 Jul 2026
Xinyu Chen, Yinping Dou, Zhenyu Nie, Weihao Yin, Zhuo Xie, Chaohui Wang, Hailong Yu, Shaokang Wang, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
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Abstract:

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EUV source, Laser-produced plasma, Foam-based Gd thin-film target, Enhancement ratio.

Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

Number of pages: 19 Posted: 06 Jul 2026
Xinyu Chen, Yinping Dou, Zhenyu Nie, Weihao Yin, Zhuo Xie, Chaohui Wang, Hailong Yu, Shaokang Wang, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
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Abstract:

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EUV source, Laser-produced plasma, Foam-based Gd thin-film target, Enhancement ratio.