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Xinyu Chen

Changchun University of Science and Technology

China

  • Changchun University of Science and Technology

SCHOLARLY PAPERS

3

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78

TOTAL CITATIONS

0

Scholarly Papers (3)

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1.

Spectral Characteristics of Gd2O3 Thin-Film Target for 6.7nm EUV Light Source

Number of pages: 19 Posted: 14 Jan 2026
Weihao Yin, Yinping Dou, Zhuo Xie, Yibin Zhang, Chaohui Wang, Xinyu Chen, Zhenyu Nie, Junbiao Wang, Hailong Yu, xun gao, Boyu Ji, Peng Lang, Xiaowei Song and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 28 (1,385,945)

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EUV radiation, electrochemical deposition, Gd2O3, thin-film target

2.

Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

Downloads 26

Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

Number of pages: 19 Posted: 06 Jul 2026
Xinyu Chen, Yinping Dou, Zhenyu Nie, Weihao Yin, Zhuo Xie, Chaohui Wang, Hailong Yu, Shaokang Wang, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 17

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EUV source, Laser-produced plasma, Foam-based Gd thin-film target, Enhancement ratio.

Enhanced narrowband 6.7nm BEUV emission from laser-produced plasma based on foam-based Gd thin-film targets

Number of pages: 19 Posted: 06 Jul 2026
Xinyu Chen, Yinping Dou, Zhenyu Nie, Weihao Yin, Zhuo Xie, Chaohui Wang, Hailong Yu, Shaokang Wang, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 9

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EUV source, Laser-produced plasma, Foam-based Gd thin-film target, Enhancement ratio.

3.

Experimental study of spectra near 6.7 nm and out-of-band radiation from Gd-based thin-film targets for EUV light source

Number of pages: 13 Posted: 26 Jan 2026
Weihao Yin, Yinping Dou, Yibin Zhang, Xinyu Chen, Chaohui Wang, Zhenyu Nie, Zhuo Xie, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 24 (1,424,331)

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EUV light source, thin-film targets, EUV spectra, OOB radiation