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Junbiao Wang

Changchun University of Science and Technology

China

SCHOLARLY PAPERS

1

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28

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0

Scholarly Papers (1)

1.

Spectral Characteristics of Gd2O3 Thin-Film Target for 6.7nm EUV Light Source

Number of pages: 19 Posted: 14 Jan 2026
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 28 (1,385,945)

Abstract:

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EUV radiation, electrochemical deposition, Gd2O3, thin-film target