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Xiaowei Song

Changchun University of Science and Technology

China

  • Changchun University of Science and Technology

SCHOLARLY PAPERS

2

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52

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Scholarly Papers (2)

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1.

Spectral Characteristics of Gd2O3 Thin-Film Target for 6.7nm EUV Light Source

Number of pages: 19 Posted: 14 Jan 2026
Weihao Yin, Yinping Dou, Zhuo Xie, Yibin Zhang, Chaohui Wang, Xinyu Chen, Zhenyu Nie, Junbiao Wang, Hailong Yu, xun gao, Boyu Ji, Peng Lang, Xiaowei Song and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 28 (1,385,945)

Abstract:

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EUV radiation, electrochemical deposition, Gd2O3, thin-film target

2.

Experimental study of spectra near 6.7 nm and out-of-band radiation from Gd-based thin-film targets for EUV light source

Number of pages: 13 Posted: 26 Jan 2026
Weihao Yin, Yinping Dou, Yibin Zhang, Xinyu Chen, Chaohui Wang, Zhenyu Nie, Zhuo Xie, xun gao, Xiaowei Song, Boyu Ji and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 24 (1,424,331)

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EUV light source, thin-film targets, EUV spectra, OOB radiation