Austria
TU Wien - Institute of Sensor and Actuator Systems
surface acoustic waves (SAW), aluminum nitride (AlN), resonator, resonance frequency, quality factor, photo-lithography
ALD, HfO2/Al2O3 nanolaminate, high-κ dielectrics, on-chip capacitor, Metal-Insulator-Semiconductor (MIS)
3C-SiC, Alternating Supply Deposition, LPCVD, silicon carbide
3C-SiC, Alternating Supply Deposition, LPCVD, Silicon Carbide
Hydrogen Storage, Graphene, Porous SiC, Thermal Desorption
MEMS resonators, Aluminium nitride (AlN), bituminous material, viscosity
3C-SiC, SiO2, Alternating Supply Deposition, LPCVD, Silicon Carbide
P(VDF-TrFE), energy storage, nanocomposite, cellulose nanofibers, barium titanate
MEMS resonators, Aluminium nitride (AlN), viscosity standards, bituminous materials, viscosity density product
MEMS, fluid-structure interaction, MEMS-FSI, FEM
3C-SiC, CTE, Silicon Carbide, Microheater
