Werner Artner

TU Wien

SCHOLARLY PAPERS

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Scholarly Papers (2)

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1.

Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition

Number of pages: 11 Posted: 24 May 2024
Philipp Moll, Sabine Schwarz, Georg Pfusterschmied, Werner Artner and Ulrich Schmid
Vienna University of Technology, Vienna University of Technology - USTEM, Vienna University of Technology, TU Wien and TU Wien - Institute of Sensor and Actuator Systems
Downloads 35 (1,002,374)

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3C-SiC, SiO2, Alternating Supply Deposition, LPCVD, Silicon Carbide

2.

Ultra-Low Cte-Mismatch of 3c-Sic-On-Si Thin Films for High Temperature Mems Applications

Number of pages: 12 Posted: 31 Aug 2024
Philipp Moll, Georg Pfusterschmied, Barbara Schmid, Sabine Schwarz, Werner Artner and Ulrich Schmid
Vienna University of Technology, Vienna University of Technology, Vienna University of Technology, Vienna University of Technology - USTEM, TU Wien and TU Wien - Institute of Sensor and Actuator Systems
Downloads 21 (1,164,518)

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3C-SiC, CTE, Silicon Carbide, Microheater