Shunsuke Yamada

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Multi-Axis Moving Coil Type Electromagnetic Actuator with Pure In-Plane Large Displacement and Rotation Angle by Using Parylene Beam and Metal Spring

Number of pages: 8 Posted: 16 Feb 2022

Huayu Wang, Shunsuke Yamada and Shuji Tanaka

affiliation not provided to SSRN, affiliation not provided to SSRN and Tohoku University

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