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Shuji Tanaka

Tohoku University

SCHOLARLY PAPERS

6

DOWNLOADS

267

TOTAL CITATIONS

0

Scholarly Papers (6)

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1.

Irreversible membrane sticking and other defects in silicon-on-nothing structures: experimental insights and cavity pressure characterization

Number of pages: 7 Posted: 17 Sep 2025
Zhengnan Tang, Andrea Vergara and Shuji Tanaka
Tohoku University, Tohoku University and Tohoku University
Downloads 66 (942,565)

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micro electro mechanical systems, silicon-on-nothing, hydrogen annealing

2.

Multi-Axis Moving Coil Type Electromagnetic Actuator with Pure In-Plane Large Displacement and Rotation Angle by Using Parylene Beam and Metal Spring

Number of pages: 8 Posted: 16 Feb 2022
Huayu Wang, Shunsuke Yamada and Shuji Tanaka
affiliation not provided to SSRN, affiliation not provided to SSRN and Tohoku University
Downloads 61 (951,658)

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electromagnetic microactuator, multi-axis motion, parylene spring, large pure in-plane displacement, large rotation angle

3.

Two-Axis Multiple Masses Resonator with Frequency and Q-Factor Matching

Number of pages: 12 Posted: 24 Feb 2023
Jianlin Chen, Takashiro Tsukamoto, Giacomo Langfelder and Shuji Tanaka
Tohoku University, Tohoku University, affiliation not provided to SSRN and Tohoku University
Downloads 60 (989,921)

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Tuning fork resonator, Independent frequency and Q-factor tuning, Squeeze film damping, Mode matching

4.

Characterization of Plasma-Activated, Thermally-Annealed Si-Sio2 Direct Bond Strength for Vapor Hf Etching

Number of pages: 7 Posted: 28 Jun 2023
Tianjiao Gong, Yukio Suzuki, Karla Hiller and Shuji Tanaka
Tohoku University, Tohoku University, Chemnitz University of Technology and Tohoku University
Downloads 42 (1,170,409)

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Silicon direct bonding, bond strength, vapor HF etching, thermal annealing, plasma activation

5.

On-Wafer Pdms Micropatterning Via Etch-Back Lift-Off and its Application to Mems Microactuators

Number of pages: 12 Posted: 26 Jul 2025
Xuchen Wang, Yukio Suzuki, Chung-Min Li and Shuji Tanaka
Tohoku University, Tohoku University, affiliation not provided to SSRN and Tohoku University
Downloads 38 (1,249,711)

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PDMS, micro-patterning, MEMS, microactuators, piezo-microspeaker

6.

Simultaneous Poling of Multiple Piezoelectric Devices

Posted: 31 Oct 2024 Last Revised: 06 Nov 2024
Andrea Vergara, Andrea Vergara, Samuel Hsieh and Shuji Tanaka
affiliation not provided to SSRN, Tohoku University, Linkoping University and Tohoku University

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piezoelectric thin film, PZT, poling