Xuchen Wang

Tohoku University

SKK Building, Katahira 2

Aoba-ku, Sendai, Miyagi 980-8577

Japan

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Scholarly Papers (2)

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1.

On-Wafer Pdms Micropatterning Via Etch-Back Lift-Off and its Application to Mems Microactuators

Number of pages: 12 Posted: 26 Jul 2025

Xuchen Wang, Yukio Suzuki, Chung-Min Li and Shuji Tanaka

Tohoku University, Tohoku University, affiliation not provided to SSRN and Tohoku University

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2.

Harmonic Amplitude Suppression in Piezoelectric MEMS Microspeakers via Micropatterned PDMS Damping Layers

Number of pages: 14 Posted: 27 Jul 2026

Xuchen Wang, Yukio Suzuki, Chung-Min Li and Shuji Tanaka

Tohoku University, Tohoku University, affiliation not provided to SSRN and Tohoku University

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