Yukio Suzuki

Tohoku University

SKK Building, Katahira 2

Aoba-ku, Sendai, 980-8577

Japan

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SCHOLARLY PAPERS

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Scholarly Papers (2)

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1.

Characterization of Plasma-Activated, Thermally-Annealed Si-Sio2 Direct Bond Strength for Vapor Hf Etching

Number of pages: 7 Posted: 28 Jun 2023

Tianjiao Gong, Yukio Suzuki, Karla Hiller and Shuji Tanaka

Tohoku University, Tohoku University, Chemnitz University of Technology and Tohoku University

Downloads 42 (1,170,409)

Abstract:

2.

On-Wafer Pdms Micropatterning Via Etch-Back Lift-Off and its Application to Mems Microactuators

Number of pages: 12 Posted: 26 Jul 2025

Xuchen Wang, Yukio Suzuki, Chung-Min Li and Shuji Tanaka

Tohoku University, Tohoku University, affiliation not provided to SSRN and Tohoku University

Downloads 38 (1,249,711)

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