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Andrea Vergara

Tohoku University

SKK Building, Katahira 2

Aoba-ku, Sendai, 980-8577

Japan

SCHOLARLY PAPERS

2

DOWNLOADS

66

TOTAL CITATIONS

0

Scholarly Papers (2)

1.

Irreversible membrane sticking and other defects in silicon-on-nothing structures: experimental insights and cavity pressure characterization

Number of pages: 7 Posted: 17 Sep 2025
Zhengnan Tang, Andrea Vergara and Shuji Tanaka
Tohoku University, Tohoku University and Tohoku University
Downloads 66 (942,565)

Abstract:

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micro electro mechanical systems, silicon-on-nothing, hydrogen annealing

2.

Simultaneous Poling of Multiple Piezoelectric Devices

Posted: 31 Oct 2024 Last Revised: 06 Nov 2024
affiliation not provided to SSRN, Tohoku University, Linkoping University and Tohoku University

Abstract:

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piezoelectric thin film, PZT, poling