Zhengnan Tang

Tohoku University

SKK Building, Katahira 2

Aoba-ku, Sendai, 980-8577

Japan

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Irreversible membrane sticking and other defects in silicon-on-nothing structures: experimental insights and cavity pressure characterization

Number of pages: 7 Posted: 17 Sep 2025

Zhengnan Tang, Andrea Vergara and Shuji Tanaka

Tohoku University, Tohoku University and Tohoku University

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