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Valeria Founta

Imec, Kapeldreef 75

Leuven, 3001

Belgium

  • Imec, Kapeldreef 75

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Scholarly Papers (1)

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Properties of Ultrathin Molybdenum Films for Interconnect Applications

Number of pages: 43 Posted: 03 Mar 2022
Valeria Founta, Jean-Philippe Soulié, Kiroubanand Sankaran, Kris Vanstreels, Karl Opsomer, Pierre Morin, Pieter Lagrain, Alexis Franquet, Danielle Vanhaeren, Thierry Conard, Johan Meersschaut, Christophe Detavernier, Joris Van de Vondel, Ingrid De Wolf, Geoffrey Pourtois, Zsolt Tőkei, Johan Swerts and Christoph Adelmann
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Abstract:

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Interconnect metallization, thin films, molybdenum, resistivity scaling