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Alexis Franquet

Imec, Kapeldreef 75

Leuven, 3001

Belgium

  • Imec, Kapeldreef 75

SCHOLARLY PAPERS

3

DOWNLOADS

168

TOTAL CITATIONS

0

Scholarly Papers (3)

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1.

Properties of Ultrathin Molybdenum Films for Interconnect Applications

Number of pages: 43 Posted: 03 Mar 2022
Valeria Founta, Jean-Philippe Soulié, Kiroubanand Sankaran, Kris Vanstreels, Karl Opsomer, Pierre Morin, Pieter Lagrain, Alexis Franquet, Danielle Vanhaeren, Thierry Conard, Johan Meersschaut, Christophe Detavernier, Joris Van de Vondel, Ingrid De Wolf, Geoffrey Pourtois, Zsolt Tőkei, Johan Swerts and Christoph Adelmann
Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Universiteit Gent - Department Vastestofwetenschappen, CoCooN, Krijgslaan 281, KU Leuven - Departement Natuurkunde en Sterrenkunde, Celestijnenlaan 200d, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75, Imec, Kapeldreef 75 and Imec, Kapeldreef 75
Downloads 123 (584,619)

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Interconnect metallization, thin films, molybdenum, resistivity scaling

2.

Temperature-Assisted High-Energy-Per-Atom Argon Cluster Sims of Layered Hybrid Nanomaterials

Number of pages: 14 Posted: 14 Jul 2025
Giuseppe Ragusano, Valentina Spampinato, Alessandro Auditore, Nunzio Tuccitto, Marta Penconi, Alberto Bossi, Alexis Franquet, Thierry Conard and Antonino Licciardello
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Catania, affiliation not provided to SSRN, affiliation not provided to SSRN, Imec, Kapeldreef 75, Imec, Kapeldreef 75 and affiliation not provided to SSRN
Downloads 24 (1,411,822)

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Time-of-flight secondary ion mass spectrometry, argon cluster depth profile, molybdenum oxide, arylamine, hybrid nanomaterials, temperature-assisted depth profile

3.

Improvement of Carbon Depth Profiling within Shallow Structures by Secondary Ion Mass Spectrometry (Sims)

Number of pages: 23 Posted: 02 Jul 2025
Alexandre MERKULOV, Alexis Franquet and Rita Tilmann
affiliation not provided to SSRN, Imec, Kapeldreef 75 and affiliation not provided to SSRN
Downloads 21 (1,459,862)

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Sputtering, Sputtering energy threshold, Ion beam with energy near the sputtering threshold, Giant cluster ion beam GCIB, Surface decontamination, Secondary ion mass spectrometry SIMS