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Bin Chen

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Impacts of Hydrogen Flow and Growth Pressure on Characteristics of Semipolar (11-2 2) Plane Alingan Quaternary Epilayers

Number of pages: 22 Posted: 21 Mar 2022
Bin Chen, Xiong Zhang, Aijie Fan, Xuguang Luo, Yang Shen, Yong Tian, Jiadong Lyu, Mu-Jen Lai, Guohua Hu and Yiping Cui
affiliation not provided to SSRN, Southeast University, affiliation not provided to SSRN, Southeast University, affiliation not provided to SSRN, affiliation not provided to SSRN, Southeast University, Southeast University, Southeast University and Southeast University
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Abstract:

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semipolar AlInGaN epilayer, indium incorporation, growth rate, surface morphology, proportion of hydrogen, growth pressure.