Key words: CeO2, high crystallinity, CMP, SiO2 film
SiO2@CeO2 nanoparticle, electrokinetic behavior, synthesis mechanism, Chemical mechanical polishing
Chlorobenzene, Catalytic combustion, Supported transition metal oxide catalysts, HCl selectivity, Polychlorinated by-products
Key words: SiO₂@Fe Core-Shell abrasives, CMP, W film
Low-temperature SCR, CO oxidation, Modified active coke, Oxygen-enriched, Synergistic removal
N-containing VOCs, Selective oxidation, Synergetic effect, Hydrocarbon-SCR, N2 selectivity