Jingwei Zhang

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Controllable Synthesis of Core-Shell Sio2@Ceo2 Abrasives for Chemical Mechanical Polishing on Sio2 Film

Number of pages: 17 Posted: 09 Oct 2023
li wang, Gaoyuan Ren, Wenxiang Xie, Jingwei Zhang, Deng Pan, Hongjiu Su and Shudong Wang
Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics, affiliation not provided to SSRN, Dalian University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics
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SiO2@CeO2 nanoparticle, electrokinetic behavior, synthesis mechanism, Chemical mechanical polishing