default author photo

Lei Chen

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

23

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Corrosion Selectivity and Structural Evolution in N Doped Sb2te Thin Films for Lithography Application

Number of pages: 19 Posted: 16 May 2022
Wei Tao, Wancheng Shen, Miao Cheng, Wanfei Li, Lei Chen, Ying Wang, Jing Hu, Qianqian Liu, Yun Ling, Jingsong Wei and Bo Liu
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 23 (1,411,822)

Abstract:

Loading...

N doped Sb2Te thin film, inorganic resist, corrosion selectivity, structural evolution, electrochemical mechanism