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Wancheng Shen

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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40

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0

Scholarly Papers (2)

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1.

Corrosion Selectivity and Structural Evolution in N Doped Sb2te Thin Films for Lithography Application

Number of pages: 19 Posted: 16 May 2022
Wei Tao, Wancheng Shen, Miao Cheng, Wanfei Li, Lei Chen, Ying Wang, Jing Hu, Qianqian Liu, Yun Ling, Jingsong Wei and Bo Liu
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 23 (1,411,822)

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N doped Sb2Te thin film, inorganic resist, corrosion selectivity, structural evolution, electrochemical mechanism

2.

Nsb­2te Heat-Mode Resist with Promising Lithographic Performance and its Mechanism

Number of pages: 8 Posted: 04 Mar 2025
Jinhan Yao, Jialong Guo, Lihao Sun, Ying Wang, Wancheng Shen, Yuting Zhou, Yanyu Liu, Wei Tao and Bo Liu
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 17 (1,491,251)

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Thin films, Amorphous materials, Sputtering, Phase transformation