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Jinhan Yao
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Nsb2te Heat-Mode Resist with Promising Lithographic Performance and its Mechanism
Number of pages: 8
Posted: 04 Mar 2025
Jinhan Yao,
Jialong Guo
,
Lihao Sun
,
Ying Wang
,
Wancheng Shen
,
Yuting Zhou
,
Yanyu Liu
,
Wei Tao
and
Bo Liu
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17
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Abstract:
Thin films, Amorphous materials, Sputtering, Phase transformation
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