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Pascal Etienne

Université Montpellier I

SCHOLARLY PAPERS

2

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38

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0

Scholarly Papers (2)

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1.

Rational Design of Si(B)Cn Microstructures Using Direct Photolithography of Patternable Preceramic Photoresists

Number of pages: 32 Posted: 21 May 2022
Quentin Hanniet, Eddy Petit, Sylvie Calas-Etienne, Pascal Etienne, Karim Aissou, Christel Gervais, philippe Miele, Benoit Charlot and Chrystelle Salameh
affiliation not provided to SSRN, University of Montpellier, Université Montpellier I, Université Montpellier I, affiliation not provided to SSRN, Sorbonne University, ENSCM, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 38 (1,222,651)

Abstract:

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Preceramic photoresists, SiCN, SiBCN, Photolithography, MEMS.

2.

Fabrication and Mechanical Properties of an Organo-Mineral Cantilever-Based Probe for Near-Field Optical Microscopy

Sensors and Actuators A: Physical Volume 212, 1 June 2014, Pages 12-17
Posted: 16 Feb 2023
Anna Tsigara, Bachar Mourched, P. Falgayrettes, Benoit Belier, E.L. Nativel, R. Kribich, Pascal Etienne, Sylvie Calas-Etienne and P. Gall-Borrut
Université Montpellier I, American University of the Middle East (AUM), Université Montpellier I, Université Paris Sud, Université Montpellier I, Université Montpellier I, Université Montpellier I, Université Montpellier I and Université Montpellier I

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Organo-mineral material, SNOM probe, Microtechnology, Cantilever tip, Nano-aperture, AFM