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Karim Aissou
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Rational Design of Si(B)Cn Microstructures Using Direct Photolithography of Patternable Preceramic Photoresists
Number of pages: 32
Posted: 21 May 2022
Quentin Hanniet
,
Eddy Petit
,
Sylvie Calas-Etienne
,
Pascal Etienne
, Karim Aissou,
Christel Gervais
,
philippe Miele
,
Benoit Charlot
and
Chrystelle Salameh
affiliation not provided to SSRN
, University of Montpellier, Université Montpellier I, Université Montpellier I,
affiliation not provided to SSRN
, Sorbonne University, ENSCM,
affiliation not provided to SSRN
and
affiliation not provided to SSRN
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38
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Abstract:
Preceramic photoresists, SiCN, SiBCN, Photolithography, MEMS.
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