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HAO HU

IEEE Senior Member

  • IEEE Senior Member

SCHOLARLY PAPERS

4

DOWNLOADS

148

TOTAL CITATIONS

0

Scholarly Papers (4)

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1.

Relationship between Edge-Grip Induced Defects on Silicon Wafers and Near-Edge Flatness

Number of pages: 7 Posted: 16 Sep 2022
HAO HU, Kari Ullakko and Xin Lai
IEEE Senior Member, Lappeenranta-Lahti University of Technology (LUT) - Material Physics Laboratory and affiliation not provided to SSRN
Downloads 73 (899,324)

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Light point defects (LPD), Edge site frontsurface-referenced least squares/range (ESFQR), Process-induced defects, Z-height double derivative (ZDD).

2.

Etch Rates for Micromachining Process in Manufacturing Hybrid Microdevices Composed of Ni-Mn-Ga and Silicon Layers

Number of pages: 7 Posted: 20 Jul 2022
HAO HU and Kari Ullakko
IEEE Senior Member and Lappeenranta-Lahti University of Technology (LUT) - Material Physics Laboratory
Downloads 57 (989,921)

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Microelectromechanical systems (MEMS), Ni-Mn-Ga, hybrid device, actuator, ferromagnetic shape memory, MSM

3.

Synthesis Approach for Ni-Mn-Ga-Enabled Micro-Pumps: Advancements in Micro-Magneto-Mechanical Systems Integration

Number of pages: 7 Posted: 13 Jun 2023
HAO HU
IEEE Senior Member
Downloads 17 (1,491,251)

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Smart materials, Micro-Magneto-mechanical systems (MAMS), Microelectromechanical systems (MEMS), Magnetic shape memory (MSM), Ni-Mn-Ga alloy

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Autonomous manufacturing, semiconductor manufacturing, physicsinformed AI, digital twins, Industry 5.0, intelligent manufacturing, scientific machine learning, semiconductor AI, Fab process innovation, AI adoption