Xin Lai

affiliation not provided to SSRN

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Relationship between Edge-Grip Induced Defects on Silicon Wafers and Near-Edge Flatness

Number of pages: 7 Posted: 16 Sep 2022

HAO HU, Kari Ullakko and Xin Lai

IEEE Senior Member, Lappeenranta-Lahti University of Technology (LUT) - Material Physics Laboratory and affiliation not provided to SSRN

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