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Kseniya Astankova

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Electronic Structure of Silicon Oxynitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition for Memristor Application

Number of pages: 14 Posted: 21 Jul 2022
Timofey Viktorovich Perevalov, V.A. Volodin, Gennadiy Kamaev, Andrey Gismatulin, Svetlana Cherkova, Igor' Prosvirin, Kseniya Astankova and Vladimir Gritsenko
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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silicon oxynitride, chemical vapor deposition, electronic structure, XPS, FTIR, memristors