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Y. Iguchi

University of Debrecen

Böszörményi u. 138

H-4032 Debrecen, 4032

Hungary

  • University of Debrecen

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Scholarly Papers (1)

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Inhibition of Interlayer Diffusion and Reduction of Impurities in Thin Metal Films by Ion Irradiation

Number of pages: 24 Posted: 10 Aug 2022
I. O. Kruhlov, A. K. Orlov, O. Dubikovskyi, Y. Iguchi, Zoltán Erdélyi, S. I. Sidorenko, T. Ishikawa, S. V. Prikhodko and S. M. Voloshko
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Debrecen, University of Debrecen, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Thin films, Diffusion, Low-energy ion irradiation, Impurities, Annealing