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T. Ishikawa

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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59

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0

Scholarly Papers (1)

1.

Inhibition of Interlayer Diffusion and Reduction of Impurities in Thin Metal Films by Ion Irradiation

Number of pages: 24 Posted: 10 Aug 2022
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Debrecen, University of Debrecen, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 59 (980,173)

Abstract:

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Thin films, Diffusion, Low-energy ion irradiation, Impurities, Annealing