(Al, Cr)N, superstoichiometry, point defects, Microstructure, hardness, fracture toughness, wear resistance
Movable magnetron, high-power-density sputtering, AlCrN, microstructure, Fracture toughness, cutting performance
W-B-C, industrial batch coater, Magnetron sputtering, damage resistance, protective coating
Impact test, Adhesion, Thin films, AlCrN coating, Magnetron sputtering, Ion-deposition flux ratio