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R. Žemlička

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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High-Power-Density Sputtering of Industrial-Scale Targets: Case Study of (Al,Cr)N

Number of pages: 24 Posted: 10 Oct 2023
Fedor F. Klimashin, J. Kluson, M. Učík, R. Žemlička, Mojmír Jílek, Andreas Lümkemann, Johann Michler and Thomas Edward James Edwards
Laboratory for Mechanics of Materials and Nanostructures - Empa — Swiss Federal Laboratories for Materials Testing and Research, PLATIT a.s., Masaryk University, affiliation not provided to SSRN, PLATIT a.s., PLATIT AG, Laboratory for Mechanics of Materials and Nanostructures - Empa — Swiss Federal Laboratories for Materials Testing and Research and Swiss Federal Laboratories for Material Science and Technology (EMPA)
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Abstract:

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Movable magnetron, high-power-density sputtering, AlCrN, microstructure, Fracture toughness, cutting performance