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Ruslan Smertin

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

3

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125

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Scholarly Papers (3)

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1.

Increasing the Thermal Stability of a Cr/Sc Multilayer by Nitriding

Number of pages: 28 Posted: 26 Sep 2023
Elena Filatova, Sergei S. Sakhonenkov, Anton Solomonov, Ruslan Smertin and Polkovnikov Vladimir
St Petersburg University, St Petersburg University, St Petersburg University, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 51 (1,063,489)

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multilayer, Cr/Sc, layer intermixing, nitriding, thermal stability

2.

Refined Thermal Stability of Cr/Sc Multilayers with Si(Be) Barrier Layers

Number of pages: 21 Posted: 05 Oct 2022
Elena Filatova, Sergei S. Sakhonenkov, Anton Solomonov, Ruslan Smertin and Polkovnikov Vladimir
St Petersburg University, St Petersburg University, St Petersburg University, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 50 (1,063,489)

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multilayers, Cr/Sc, layer intermixing, barrier layer, thermal stability

3.

Impact of Barrier Layer on Microstructure of Mo/Be Multilayers for the Euv Range Before and after Annealing

Number of pages: 22 Posted: 04 Jul 2025
A.U. Gaisin, Ruslan Smertin, Nikolay Chkhalo and Elena Filatova
Saint Petersburg State University, affiliation not provided to SSRN, affiliation not provided to SSRN and St Petersburg University
Downloads 24 (1,411,822)

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Mo/Be, multilayer mirror, barrier layer, thermal stability, X-ray diffraction, x-ray reflectometry