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Nikolay Chkhalo

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

5

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186

TOTAL CITATIONS

0

Scholarly Papers (5)

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1.

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Downloads 95 (736,406)

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 26 Feb 2025
Mikhail Mikhailenko, Alexei Chernyshev, Alexei Pestov, Nikolay Chkhalo, Anastasia N. Orlova, Maria Zorina, Niranjan Kumar, S. Goryainov and Vladimir Volodin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 58 (1,006,630)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 27 Feb 2025
Mikhail Mikhailenko, Alexei Chernyshev, Alexei Pestov, Nikolay Chkhalo, Anastasia N. Orlova, Maria Zorina, Niranjan Kumar, S. Goryainov and Vladimir Volodin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 37 (1,296,409)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness

2.

B4c Barrier Layers in Ti/Cr Multilayers: Suppressing Interdiffusion and Extending Thermal Stability

Number of pages: 37 Posted: 01 Apr 2025
Elena Filatova, A.V. Karataev, A.U. Gaisin, Sergei S. Sakhonenkov, Polkovnikov Vladimir and Nikolay Chkhalo
St Petersburg University, affiliation not provided to SSRN, Saint Petersburg State University, St Petersburg University, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 37 (1,236,159)

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multilayer X-ray mirror, Ti/Cr, intermixing, Thermal stability, XPS, XRD

3.

Impact of Barrier Layer on Microstructure of Mo/Be Multilayers for the Euv Range Before and after Annealing

Number of pages: 22 Posted: 04 Jul 2025
A.U. Gaisin, Ruslan Smertin, Nikolay Chkhalo and Elena Filatova
Saint Petersburg State University, affiliation not provided to SSRN, affiliation not provided to SSRN and St Petersburg University
Downloads 24 (1,411,822)

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Mo/Be, multilayer mirror, barrier layer, thermal stability, X-ray diffraction, x-ray reflectometry

4.

Study of the Temporal Stability of the Reflection Coefficient in the Vicinity of 58.4 Nm of Narrow-Band Si/Al/Sc Multilayer Mirrors with Mosi2 Protective Cap Layer

Number of pages: 20 Posted: 02 Jun 2023
Nikolay Tsybin, Nikolay Chkhalo, Mikhail Drozdov, Alexey Lopatin, Valery Luchin, Nikolay Salashchenko and Sergey Zuev
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 23 (1,411,822)

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Multilayer mirror, temporal stability, aluminum, scandium, extreme ultraviolet, microstructure, impurities, spectral width

5.

Effect of 100 keV Helium Ions on Be/Si/Al Multilayer X-ray Mirrors

Number of pages: 17 Posted: 27 Jan 2026
Roman Pleshkov, Valerii K. Vasiliev, Mikhail Drozdov, Kirill V. Durov, Maria Zorina, Sergey Zuev, Dmitry Korolev, Polkovnikov Vladimir, Nikolay Chkhalo and Pavel Yunin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 7 (1,566,597)

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Multilayer mirrors, X-Ray Spectroscopy, radiation resistance, ion irradiation, helium ions