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Nikolay Tsybin

affiliation not provided to SSRN

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Study of the Temporal Stability of the Reflection Coefficient in the Vicinity of 58.4 Nm of Narrow-Band Si/Al/Sc Multilayer Mirrors with Mosi2 Protective Cap Layer

Number of pages: 20 Posted: 02 Jun 2023
Nikolay Tsybin, Nikolay Chkhalo, Mikhail Drozdov, Alexey Lopatin, Valery Luchin, Nikolay Salashchenko and Sergey Zuev
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Multilayer mirror, temporal stability, aluminum, scandium, extreme ultraviolet, microstructure, impurities, spectral width